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MEMS mechanical sensors

Beeby, Steve, Ensel, Graham, Kraft, Michael, White, Neil

Part of the Artech House microelectromechanical system series series

See all formats and editions

The main aim of this book is to give an overview of MEMS mechanical transducers.

The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

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Product Details

Publisher/Imprint Artech House

ISBN/Ean1580538738 / 9781580538732

FormateBook (Adobe Pdf)

Dewey681.2

Published30/04/2004

Book LanguageEnglish

Pages259 pages

Copy LimitsCopy: 10%; print: 10%

BIC TJF Electronics engineering