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Symposium on VLSI Technology

Institute of Electrical and Electronics Engineers

See all formats and editions

These conference prodeedings cover such topics as: copper interconnects; novel devices; high-K dielectrics; process technology; embedded DRAM; gate electrode engineering; DRAM cells; gate oxide scaling and reliability; DRAM capacitors; and high performance RF.

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Product Details

Publisher/Imprint I.E.E.E.Press

ISBN/Ean0780363086 / 9780780363083

FormatCD-ROM

Dewey621.395

Published01/07/2000

Country of PubUnited States

ReadershipProfessional & Vocational/Postgraduate, Research & Scholarly Learn More

BIC TJFC Circuits & components