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Image for Microlithography fundamentals in semiconductor devices and fabrication technology
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Microlithography fundamentals in semiconductor devices and fabrication technology

Ito, Toshio, Nonogaki, Saburo, Takumi, Ueno
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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.

Considers future trends in lithography and resist material technology.

Reviews the interaction of light, electron beams, and X-rays with resist materials."

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£275.00
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Product Details
Marcel Dekker
1482273764 / 9781482273762
eBook (Adobe Pdf)
621.38152
08/10/2018
English
336 pages
Copy: 30%; print: 30%
Derived record based on unviewed print version record.
TDCP Plastics & polymers technology, TJF Electronics engineering, TJFC Circuits & components, TJFD5 Semi-conductors & super-conductors
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