Semiconductor Measurements and Instrumentation (2nd ed)

With semiconductor fab construction booming, a vast and growing audience awaits this updated edition of a classic reference.

It incorporates all the new approaches and tools for semiconductor material characterization that have been developed to accommodate increasingly smaller semiconductor geometries.

Advanced techniques are clearly spelled out for evaluating crystal defects, impurity concentration, lifetime, film thickness, resistivity, and other important electrical properties such as mobility, Hall Effect, and conductivity type.

Highly accurate ways of measuring hardness, stress, and various kinds of surface contamination are included.