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Image for Selected Papers on Optical Microlithography

Selected Papers on Optical Microlithography

Stover, Harry L

Part of the SPIE milestones series series

See all formats and editions

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Product Details

Publisher/Imprint SPIE Society of Photo-Optical Instrumentation Engi

ISBN/Ean0819409855 / 9780819409850

FormatHardback

Dewey621.38152

Country of PubUnited States

Pages676 pages, illustrations

Dimensions216 x 286 mm, 1905 grams

ReadershipGeneral (US: Trade)/Professional & Vocational/Postgraduate, Research & Scholarly/Undergraduate Learn More

BIC TTB Applied optics