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International Conference on Extreme Ultraviolet Lithography 2018

Paperback / softback 28 Feb 2019
Publisher SPIE Press
ISBN: 9781510622135
Dewey: 621.364
£142.00
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Extreme Ultraviolet (EUV) Lithography VI

Paperback / softback 30 Jul 2015
Publisher SPIE Press
ISBN: 9781628415247
Dewey: 621.364
£140.00
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Selected Papers on Ultraviolet Optics and Technology

Paperback / softback 30 Jun 2006
Publisher SPIE Press
ISBN: 9780819413185
Dewey: 621.364
£109.00
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£159.99
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Out of Print

EUV Sources for Lithography

Hardback 30 Nov 2005
Publisher SPIE Press
ISBN: 9780819458452
Dewey: 621.364
£173.00
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Extreme Ultraviolet (EUV) Lithography - Volume 7

Paperback 30 Jul 2016
Publisher SPIE Press
ISBN: 9781510600119
Dewey: 621.364
Out of Print
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